Fabrication of Flexible Oriented Magnetic Thin Films with Large in-plane Uniaxial Anisotropy by Roll-to-roll Nanoimprint Lithography

摘要

Here, we report wafer scale fabrication of densely packed Fe nanostripe-basedmagnetic thin films on a flexible substrate and their magnetic anisotropyproperties. We find that Fe nanostripes exhibit large in-plane uniaxialanisotropy and nearly square hysteresis loops with energy products (BH)maxexceeding 3 MGOe at room temperature. High density Fe nanostripes werefabricated on 70 nm flexible polyethylene terephthalate (PET) gratings, whichwere made by roll-to-roll (R2R) UV nanoimprintlithography technique. Observedlarge in-plane uniaxial anisotropies along the long dimension of nanostripesare attributed to the shape. Temperature dependent hysteresis measurementsconfirm that the magnetization reversal is driven by non-coherent rotationreversal processes.